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Name
Wafer AOI Inspection Machine
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Features
Customizable carrier fixtures (e.g. mother-child rings) compatible with upstream/downstream equipment;
Built-in wafer position & angle data organization and feedback.
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Wafer Size
Max 8-inch
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UPH
120
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Equipment Dimensions
L2400×W1100×H2400mm (For reference only)
Wafer AOI Inspection Machine
The wafer AOI inspection machine implements automated carrier handling for LED chip wafers and establishes AOI Mapping data, achieving all-die positional accuracy deviation <2μm.
Details
Technical Specification
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